jf 21 TU/e Science Park De Zaale 20 5612 AJ Eindhoven Nederland Contact: W. Arnold Bik T: +31 (0)6-26966582 E: info@detect99. nl I: www. detect99. nl ION BEAMANALYSIS OF THIN LAYERS Ion beam analysis (IBA) Ion beam analysis techniques forma group of powerful methods to analyse the composition and thickness of thin films with thicknesses between sub-monolayer and micron(s). Techniques as RBS, ERD, NRA, PIXE and PIGE provide useful additions to techniques such as SIMS, AES, SEM-EDS, FTIR, XPS, etc. The results are easy to interpret and, in contrast to the results of many other techniques, unambiguously quantifiable. IBA is ideal to determine elemental concentration depth profiles, contaminations and thickness in terms of at/cm2and also the film density when the thickness in nm is known. Contact: Wim Arnold Bik 06 26966582 info@detect99.nl EXAMPLE RBS A multi-layer consisting of 4 Ag/TiO2 bilayers on a Si substrate, as measuredby RBS. Thetable below shows theRBS outcome. EXAMPLE ERD Diffusion ofH and D during annealing at 1100°C made visible w ERD: Mikrocentrum High Tech Platform Bedrijvengids 2021
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